Surfscan sp1 manual

2006 KLA-Tencor Corp Surfscan SP2 XP Particle Measurement. Manufacturer: KLA-Tencor. Model: Surfscan. KLA-Tencor Corp. Surfscan SP2 XP Particle Measurement Currently Configured for 300mm wafer size EQUIPMENT DETAILS Upgraded to XP in 2012. Killinick, Ireland. As the first unpatterned wafer inspection platform to incorporate deep-ultraviolet (DUV) illumination, the Surfscan SP3 systems feature dramatic advances in sensitivity and throughput over their industry-benchmark predecessor, the Surfscan SP2XP. The Surfscan SP3 platform is also designed for extension to the next wafer size: 450mm. The added capabilities come from a software upgrade dubbed Monitor expert 4.0 (MX 4.O). This will enable chipmakers to do away with more time consuming and manual process-monitoring steps with the Surfscan SP1, according to the San Jose-based metrology company. KLA-Tencor Surfscan SP1-TBi. Non-Patterned Wafer Particle Measurement System. Triple Beam illumination (TBi) Provides Sensitivity, Repeatability, Surface Quality Measurements & Throughput Capabilities Required for 0.18um Process Technologies & Beyond. Configured for 200mm/300mm wafers. Automatic or manual wafer loading; can be used with small pieces or full wafers up to 8" diameter. View Details >> Equipment: Rudolph Research FE-IIID Focus Dual Wavelength Ellipsometer Description: KLA Tencor Surfscan SP1-DLS Wafer Surface Analysis System set up for 200mm Edge Grip Handler. Cassette Open Handler System/SMIF/Dual Cassette. KLA-Tencor ' s Surfscan SP1 TBI is a surface scanning inspection system consisting of a normal and an oblique incidence be am. The s ystem was designed to meet the challenging needs of silicon The Puma 9980, CIRCL5 and Surfscan SP5 XP provide early identification of yield excursions across a broad range of line, process and tool monitoring applications, helping chipmakers accelerate the production ramp and maximize the yield of leading-edge device technologies. With enhanced defect type capture, the Puma 9980 laser scanning inspector Defect Detecting, Positioning, and Sizing by KLA-Tencor Surfscans (6200, 6400, SP1-classic and SP1-TBI) We stock spare parts for Surfscan 4500 and 5500 Wafer Inspection Systems. All Parts are subject to availability. Please contact us for additional information and pricing. Surfscan Laser Info and Listings. High Voltage Power Supply PCB. Tencor P/N 129861. New with 90 Day warranty. Works with SFS 5500. Manufacturer. Product Spec. Sheets & Manuals; Laser Classification & Safety; Laser Repair. AGFA Laser Replacement and Repair; ABI / Applied Bio; Surfscan 6200; Surfscan 6220; Surfscan 6400; Surfscan 6420; Surfscan 7600; Surfscan 7700; AIT I; AIT III; AIT SP1; AIT XP; SP 1; All repairs include an exceptional warranty. NLC Key Features: Economical Laser 詳細. パターン化されていないウェハ欠陥検査システム Surfscan® SP7パターン化されていないウェハ検査システムは、EUVリソグラフィ用ものを含むプロセス、材料、およびツールの認定を通じて、最先端のロジックおよびメモリ設計ノードをサポートします